Electromechanics and MEMS /
"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessa...
محفوظ في:
| المؤلفون الرئيسيون: | , |
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| الشكل: | كتاب |
| اللغة: | الإنجليزية |
| منشور في: |
Cambridge ; New York :
Cambridge University Press,
2013.
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| الموضوعات: | |
| الوصول للمادة أونلاين: | Get the E-Book |
| الوسوم: |
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جدول المحتويات:
- Machine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS.