Electromechanics and MEMS /

"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessa...

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Bibliographic Details

Main Authors:	Jones, T. B. (Thomas Byron), 1944- (Author), Nenadic, Nenad G. (Author)
Format:	Book
Language:	English
Published:	Cambridge ; New York : Cambridge University Press, 2013.
Subjects:	Microelectromechanical systems. Technology & Engineering / Electronics / Optoelectronics.
Online Access:	Get the E-Book
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